Elastic Property of Line Resist Pattern of 60nm Width Analyzed by Atomic Force Microscope (AFM)
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of The Adhesion Society of Japan
سال: 2001
ISSN: 0916-4812,2187-4816
DOI: 10.11618/adhesion.37.353